Nikon ZMI-4104C – 4-axis interferometer measurement board for precision stage control and alignment

The Nikon ZMI-4104C is a 4‑channel interferometer measurement board widely used in high‑precision motion systems—think wafer steppers, precision XY stages, and nanometer‑level positioning lines. From my experience, this board sits at the heart of systems where sub‑micron repeatability is not a nice‑to‑have, it’s mandatory. It interfaces with heterodyne laser interferometer optics and feeds the host controller with ultra‑stable position data across up to four axes.

You might notice that the ZMI‑4104C shows up often as a drop‑in spare for Nikon lithography and precision metrology equipment. That’s typically why customers ask for it—minimal downtime, consistent calibration behavior, and a very predictable integration story. One thing I appreciate is how it preserves backward compatibility with existing optics, cabling, and rack layouts, which in many cases avoids costly redesigns.

Our Order Placement Process and Guarantees

• Warranty period: 365 days
• Delivery time: 1 week for in‑stock items; no more than one month at the latest
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Key Features

• 4‑axis heterodyne measurement – Supports up to four interferometer channels for multi‑axis stage control and alignment tasks.
• High stability, low drift – Designed for nanometer‑class resolution when paired with compatible interferometer optics and lasers.
• Rack/backplane integration – Installs in OEM rack systems, keeping wiring short and signal integrity high.
• Process‑friendly diagnostics – Status LEDs and service access simplify calibration checks and troubleshooting during maintenance windows.
• Field‑proven in Nikon platforms – In most cases, used as a like‑for‑like spare in Nikon lithography and precision positioning equipment to reduce qualification time.

Technical Specifications

Application Fields

The ZMI‑4104C is typically used wherever stage feedback must be both fast and extremely accurate:

• Semiconductor lithography (stepper/aligner stage metrology and real‑time control)
• Precision XY/XYZ stages for micro‑machining, laser processing, and inspection
• Optical and interferometric metrology benches (precision alignment, drift monitoring)
• High‑accuracy assembly cells where sub‑micron placement is required

Advantages & Value

• Reliability – Proven field life in cleanroom environments; stable behavior across long production runs.
• Compatibility – Works with existing interferometer optics and cables used in Nikon platforms, which in many cases avoids new qualifications.
• Lower total cost – A like‑for‑like replacement reduces downtime, re‑tuning effort, and operator retraining.
• Technical support – Guidance on installation, handling, and verification to help you hit spec quickly after a swap.

Installation & Maintenance

• Environment: Install in a clean, temperature‑controlled cabinet with adequate airflow; keep cables short and properly shielded.
• Wiring: Observe ESD precautions; verify grounding continuity; route interferometer leads away from high‑current lines.
• Calibration: After replacement, run your standard stage calibration and linearity checks; verify laser frequency stability and reference alignment.
• Maintenance: Periodic connector cleaning (lint‑free swabs), inspection of cable strain relief, and firmware/config backup as part of scheduled PM.
• Safety: Lockout/tagout the rack supply before handling; avoid touching exposed components; allow time for capacitors to discharge.

Quality & Certifications

• Manufacturer quality systems aligned with ISO 9001
• CE and RoHS compliance typical for rack‑mounted electronics
• Warranty: 12 months (365 days)

Feedback from a recent user in a wafer tool refurbishment line: “Swapped the ZMI‑4104C in under an hour, re‑zeroed the axes, and our overlay numbers were back where they should be. No surprises, which is what we wanted.”