Description

Detailed Technical Spec Sheet

• Brand: LAM Research
• Model: 61-380630-00
• Product Type: 32TC Temperature Process Controller Module
• Condition: Brand New Original
• Stock: In Stock Immediately
• Delivery Time: Shipped within 3 working days after payment confirmation
• Warranty: 12-month full functional warranty
• Control Channels: 32 independent thermocouple temperature control loops
• Control Accuracy: ±0.1°C steady-state precision
• Supported Sensors: Multiple thermocouple types, RTD temperature inputs
• Control Output: Analog 4–20mA / PWM proportional heating control signals
• Power Supply: 24 VDC ±5%, typical consumption 200mA
• Communication Interfaces: Dual RS232 + Ethernet, Modbus TCP protocol support
• Digital I/O: 8 digital inputs, 6 digital outputs, 4 analog monitoring inputs
• Operating Environment: Cleanroom compatible; -10°C ~ +55°C ambient temperature
• Protection Grade: IP21 cabinet internal installation
• Mounting: Standard rack mount inside LAM semiconductor tool electrical cabinet
• Compliance Certifications: CE, UL 508, RoHS 2
• Built-in Protection: Overheat, overcurrent, sensor open-circuit auto alarm & shutdown
• Application: Semiconductor wafer etch, thin film deposition, ion implantation, oxidation & diffusion process temperature regulation
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SEO Main Description Paragraph

The LAM Research 61-380630-00 is a dedicated 32-channel precision temperature controller built exclusively for LAM semiconductor manufacturing processing tools. This 61-380630-00 module delivers ultra-stable ±0.1°C temperature regulation across 32 independent heating loops, eliminating temperature fluctuation defects that damage wafer yield during critical etch and deposition production steps. Equipped with dual RS232 and Ethernet communication ports, the 61-380630-00 enables real-time two-way data exchange with tool host controllers for full process monitoring, recipe parameter storage and fault log recording. Integrated multi-layer safety protection automatically triggers alarms and power cutoffs for broken sensors or abnormal heating loads to safeguard expensive vacuum chamber hardware. Every LAM Research 61-380630-00 unit undergoes factory calibration and long-duration burn-in testing prior to shipment, supported by instant spot inventory and reliable long-term warranty to minimize costly semiconductor fab equipment downtime for process maintenance engineers and semiconductor equipment integrators worldwide.

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