Description

Lam Research 810‑068158‑015 Robot Interface PCB Assembly

Technical Specifications

• Product Model: 810‑068158‑015
• Brand: Lam Research
• Warranty: One Year
• Module Type: Wafer robot interface PCB assembly
• Function: Signal‑interface board between wafer‑handling robot and tool main controller; handles robot motion commands, position feedback, hand‑shaking and interlock signals for wafer transfer sequences
• Interfaces: D‑sub robot motor / feedback connectors, tool‑system bus connector, status I/O terminals
• Operating Temperature: 0 °C ~ +50 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 tool‑rack plug‑in PCB assembly
• Accuracy Class: Semiconductor wafer‑robot motion‑interface control grade
• System Compatibility: Lam 300 mm wafer transfer robot subsystem
• Diagnostics: Status LEDs for robot‑communication link health, motion‑handshake signal test‑points
• Humidity: 5‑95 % RH non‑condensing, clean‑room compliant
• Weight: 0.74 kg
• Dimensions: Standard Lam robot‑interface PCB footprint
• 

Product Overview

810‑068158‑015 robot‑interface PCB acts as communication bridge between the wafer‑handling transfer robot and the main tool controller. It passes motion‑commands, receives robot position‑feedback and manages safety‑interlock hand‑shaking for wafer‑load‑lock and chamber wafer‑transfer sequences. Fault on this board will block wafer handling and bring tool to idle state. Surplus and refurbished tested spare robot‑interface board for fab tool robot‑subsystem maintenance‑projects.

Application Notes

‑ ESD anti‑static handling is required for PCB replacement. ‑ Perform full wafer‑transfer teach‑and‑verify sequence after board swap‑out. ‑ Typical deployment: Lam wafer‑robot‑interface PCB spare‑part stocking.