Description

1. Product Title

ZYGO ZMI‑4004‑ 4‑Axis VME64x Laser Interferometer Measurement Board

2. Product Overview

ZMI‑4004 is 4‑axis high‑performance laser interferometer measuring board of ZYGO ZMI family, built for VME64x chassis installation. It supports four‑channel simultaneous displacement measurement with sub‑nanometer resolution, working cooperatively with ZMI laser optical heads. High‑speed signal acquisition and real‑time position calculation enable multi‑axis synchronous position feedback for multi‑degree‑of‑freedom motion platforms. Modular stacking supports system expansion up to 64 measurement axes. ZMI‑4004 is key spare hardware for semiconductor lithography‑related equipment and precision multi‑axis positioning systems.

3. Technical Specifications

• Brand: ZYGO
• Model: ZMI‑4004
• Warranty: One Year
• Condition: 100% New & Original
• Measurement Axes: 4‑axis simultaneous measurement
• Resolution: 0.15 nm
• Form Factor: 6U VME64x board
• Minimum input optical power: 1.0 µW
• Operating Temp: 0°C ~ +40°C
• 

4. Application Scenarios

• Semiconductor Lithography & Inspection Tools: Multi‑axis position feedback for high‑precision motion stages.
• Ultra‑precision Multi‑axis Positioning System: Laser interferometry displacement measurement for gantry and multi‑DOF platforms.
• Advanced Metrology Equipment Maintenance: Spare measuring board for ZYGO ZMI‑series laser measurement racks.