Description

1. Product Title

ZYGO ZMI‑2002 (8020‑0211‑1‑J)‑ Dual‑Axis Laser Interferometer Measurement Board

2. Product Overview

ZMI‑2002 (8020‑0211‑1‑J) is ZYGO high‑precision heterodyne laser interferometer measurement board for VME‑bus chassis. It performs dual‑axis sub‑nanometer‑level displacement and position measurement when paired with ZMI‑series laser optical heads. It captures optical interference signals, carries out real‑time position computation and outputs measurement data to host controllers. Integrated environmental compensation corrects measurement errors caused by air temperature, pressure and humidity. Maintains ultra‑high measurement accuracy for precision motion stages. ZMI‑2002 8020‑0211‑1‑J serves as critical spare for semiconductor equipment and precision metrology systems.

3. Technical Specifications

• Brand: ZYGO
• Model: ZMI‑2002, 8020‑0211‑1‑J
• Warranty: One Year
• Condition: 100% New & Original
• Measurement Axes: Dual‑axis
• Resolution: Sub‑nanometer level
• Form Factor: 6U VME bus board
• Operating Temp: 0°C ~ +40°C
• Compatibility: ZMI‑series laser interferometer optical heads
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4. Application Scenarios

• Semiconductor Manufacturing Equipment: Position measurement for wafer‑processing precision motion stages.
• Ultra‑precision Metrology Laboratory: Laser interferometry displacement monitoring for high‑accuracy positioning systems.
• Aerospace Precision‑testing Machine: Spare measurement board for legacy ZYGO laser metrology racks.