Description

1. Product Title

MKS AX8407‑10‑ High‑Flow Ozone Generator System Module

2. Product Overview

AX8407‑10 is a high‑concentration, high‑flow ozone generator module from MKS AX8407 series, designed for semiconductor and industrial water‑treatment processes. It produces high‑purity ozone gas using oxygen feed‑gas, supports 5‑40 slm oxygen flow range, delivers ozone concentration up to 335 g/Nm³. It adopts closed‑loop process control, includes integrated cooling‑water monitoring, gas‑pressure monitoring and interlock safety logic. Equipped with local HMI and remote communication interface for recipe setup and status readback. This is critical process‑critical spare for wet‑clean, surface‑treatment and ozone disinfection production equipment.

3. Technical Specifications

• Brand: MKS
• Model: AX8407‑10
• Warranty: One Year
• Condition: 100% New & Original
• Oxygen Feed‑gas: Grade 6 or higher oxygen
• Ozone Output: Max 335 g/Nm³
• O₂ Flow Range: 5‑40 slm
• Power Input: 208 VAC, 3‑phase, 15 A, 50/60 Hz
• Cooling Water: 5‑25 °C, minimum 7.6 L/min flow rate
• Interface: Local panel control + remote communication
• Operating Temp: 10‑40 °C
• Mounting: Cabinet chassis mounting
• Protection Class: IP20
• 

4. Application Scenarios

• Semiconductor Wet‑Clean Process: High‑purity ozone supply for wafer surface cleaning stations.
• Industrial Water‑Treatment System: Ozone disinfection and oxidation process equipment.
• Surface‑Treatment Production Line: Spare ozone generator module for installed MKS AX8407 series systems.