Description

1. Product Title

MKS MKS979B‑01‑0013‑ Wide‑Range Vacuum Pressure Transducer

2. Product Overview

MKS979B‑01‑0013 is a combined hot‑cathode and MicroPirani vacuum transducer for high‑vacuum process chambers. It delivers continuous absolute pressure measurement across ultra‑high vacuum to atmospheric range, outputs analog voltage signal and digital serial data for host system acquisition. Integrated filament control and degas functions support automatic operation within vacuum processing equipment. This unit resolves the measurement gap between rough and high‑vacuum ranges, eliminating the need for multiple separate gauges. Widely used as maintenance spare for semiconductor, coating and analytical vacuum systems.

3. Technical Specifications

• Brand: MKS
• Model: MKS979B‑01‑0013
• Warranty: One Year
• Condition: 100% New & Original
• Sensor Type: Hot‑cathode ion gauge + MicroPirani sensor
• Measurement Range: 5×10⁻¹⁰ Torr to atmospheric pressure
• Output: Analog signal, digital serial interface
• Functions: Filament select, degas control, set‑point relay
• Power Supply: 24 VDC
• Operating Temp: 0 °C ~ +50 °C
• Mounting: Vacuum flange mounting
• Protection Class: IP20
• 

4. Application Scenarios

• Semiconductor Vacuum Processing Chamber: Wide‑range vacuum gauge spare for deposition and etching equipment.
• Optical Coating System: Combined high‑vacuum pressure‑measurement replacement for coating machine vacuum chambers.
• Analytical Instrument Vacuum System: Drop‑in spare for installed MKS 979B‑series vacuum transducer hardware.