Description

1. Product Title

Granville‑Phillips 354019‑TD‑T‑ 354 Micro‑Ion Vacuum Measurement Module

2. Product Overview

354019‑TD‑T is an integrated micro‑ion vacuum sensor module manufactured by Brooks Granville‑Phillips, designed for high‑vacuum pressure measurement within semiconductor and thin‑film processing equipment. It combines ion gauge sensing hardware with local signal processing circuitry, delivering pressure reading outputs and supporting filament selection, degas function and remote control via D‑Sub I/O interface. The unit eliminates the requirement for separate external gauge controller hardware, directly communicating pressure data to host process systems. As an original OEM spare, it resolves vacuum monitoring failures for deposition, etching and coating chambers, avoiding unplanned process interruptions.

3. Technical Specifications

• Brand: Granville‑Phillips (Brooks Automation)
• Model: 354019‑TD‑T
• Warranty: One Year
• Condition: 100% New & Original
• Sensor Principle: Hot‑cathode micro‑ion gauge
• Supply: 24 VDC, max 12 W
• Interface: D‑Sub I/O connector
• Functions: Dual filament select, degas, remote control
• Mounting: KF vacuum flange mounting
• Operating Temp: 0 °C ~ +50 °C
• Protection Class: IP40 (module housing)

4. Application Scenarios

• Semiconductor Vacuum Process Chamber: High‑vacuum gauge spare for deposition and etching equipment.
• Optical Coating Machine Vacuum System: Replacement micro‑ion module for thin‑film production chambers.
• Vacuum Analytical Instrument Maintenance: Drop‑in spare for installed 354019‑TD‑T hardware.