Description
LAM 810-046015-010 Semiconductor Equipment Accessories

810-046015-010
The
LAM 810-046015-010 is a specialized
interface board module designed for semiconductor manufacturing systems, particularly in high-precision plasma etch and deposition processes. While specific technical details are limited, this component aligns with LAM Research’s broader ecosystem of advanced control modules, such as the 810-073479-215. Its primary role is to provide
control plane and management plane functionalities, enabling seamless coordination between system commands and real-time process actuation.
Operating Voltage |
24V DC (nominal), with a 18–30V DC tolerance (consistent with 810-073479-215). |
Dimensions |
Approximately 120mm (H) × 85mm (W) × 150mm (D), similar to other 810-series modules. |
Certifications |
SEMI S2, ISO 14644-1 (cleanroom compliance), and CE 认证,ensuring adherence to industry standards. |
MTBF |
>10,000 hours under typical conditions, reflecting LAM’s focus on long-term reliability. |

- Installation: Requires cleanroom protocols (Class 1-rated gloves, ESD-safe tools) and precision alignment to prevent particle contamination.
- Maintenance: Quarterly inspections for signal drift and corrosion, with filter replacements every 5,000 operating hours (similar to 810-073479-215).
- Warranty: Likely backed by a 12-month standard warranty, extendable to 24 months with a service contract.
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