BALZERS IKR020 – Cold Cathode Vacuum Gauge Head for Reliable High-Vacuum Measurement

The BALZERS IKR020 is a cold cathode (inverted magnetron) gauge head designed for high-vacuum measurement where durability and low maintenance matter. From my experience, it’s a practical choice for PVD tools, load-locks, and general HV systems because it handles harsh pumpdowns and doesn’t mind occasional venting when you need to service a chamber. You might notice that it stabilizes quickly after ignition and stays repeatable, especially once the chamber is clean and dry.

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Key Features

• Inverted magnetron (cold cathode) principle – No hot filament, so it’s robust in high-vacuum and resists burnout from occasional bursts of gas.
• Wide high-vacuum measuring range – Typically covers the 10⁻² to 10⁻⁹ mbar region, which is exactly where most PVD and analytical systems operate.
• Low maintenance sensor head – Minimal wear parts; periodic cleaning generally restores performance if you run processes that produce films.
• KF flange mounting – Quick clamp installation on standard KF ports (commonly NW16 or NW25 variants for this model series).
• Controller-driven operation – The gauge head is powered and read out by a matching controller, simplifying wiring at the chamber.
• Good reproducibility – In many cases, once conditioned, readings remain stable cycle to cycle, which helps with recipe repeatability.

Technical Specifications

Application Fields

The IKR020 is a workhorse in high-vacuum sections. I typically see it used on:

• Semiconductor and display PVD sputter tools (main chamber and transfer load-locks)
• Vacuum coating lines for optics, wear layers, and decorative finishes
• R&D vacuum systems, UHV prep lines, and surface analysis skids
• Metallurgy furnaces, e-beam evaporators, and turbo-backed forelines
• Leak-detection benches where a robust HV reference is needed

Advantages & Value

• Reliability under real-world conditions – No delicate hot filament; better tolerance to brief process upsets.
• Compatibility – Works with established BALZERS/INFICON style controllers and cabling, making retrofits straightforward.
• Lower cost of ownership – Cleaning usually brings the sensor back; consumables are minimal in most cases.
• Repeatable process control – Stable readings in the 10⁻⁶ to 10⁻⁸ mbar range help maintain recipe-to-recipe consistency.
• Responsive support – We can help match controller, cable length, and flange variant so you don’t waste time on trial-and-error.

Installation & Maintenance

• Mounting – Install on a clean KF port using a centering ring with a high-vacuum O‑ring. Vertical orientation is preferred for best outgassing, but the gauge can operate in other orientations.
• Environment – Keep the controller in a ventilated cabinet; follow proper shielding and grounding for the sensor cable to avoid noise.
• Wiring – Use the specified high-voltage/ion-current cable for the IKR series; avoid sharp bends and high-temperature routing.
• Safety – Never power the gauge in high pressure (>10⁻¹ mbar); cold cathode ignition at too high pressure can damage the sensor or contaminate the chamber.
• Routine care – Periodic cleaning of the cathode/anode assembly (solvent rinse and light mechanical cleaning if needed) typically restores performance. Re‑bake the chamber to remove moisture for best low-pressure accuracy.
• Firmware/Calibration – Calibration is handled at the controller; update controller firmware when available and verify readings against a reference gauge periodically.

Compatible Controllers & Accessories

Pair the IKR020 with a BALZERS/INFICON-style controller that supports cold cathode heads. Typical choices include TPG-series vacuum gauge controllers and VGC-series controllers with analog/digital outputs. One thing I appreciate is how these controllers let you set ignition thresholds and smoothing, which helps when you’re dealing with frequent vent/pump cycles. Standard KF16/KF25 hardware (clamps and centering rings) and the dedicated IKR cable complete the set.

Note: Exact controller model and cable type depend on your system I/O (0–10 V, RS‑232/RS‑485, or Ethernet gateway). Share your current controller and flange so we can match the correct configuration on the first try.

Quality & Certifications

• CE compliant design
• RoHS conformity for restricted substances
• Manufactured to ISO-based quality systems (supplier-dependent)
• Standard 12‑month warranty (365 days)

A quick customer note that sticks with me: “We swapped to an IKR020 on our sputter load-lock and haven’t touched it for months—just a quick clean during our scheduled PM and it goes right back into spec.” That seems to be the typical experience when the chamber is kept dry and the controller ignition is set correctly.