LEYBOLD TURBOVAC 50 – Compact turbomolecular pump for clean, fast high-vacuum

The LEYBOLD TURBOVAC 50 is a small, high-speed turbomolecular pump designed for labs and OEM tools that need dependable high vacuum down to the 10⁻⁹ mbar range with minimal footprint. From my experience, it’s a solid fit for R&D chambers, SEM load locks, surface analysis stages, and compact process modules where a DN 63 inlet is common and fast pump-down is critical.

One thing I appreciate is how easily it pairs with standard Leybold backing pumps and controllers, so integration tends to be straightforward. You might notice that noise and vibration are low for its size, which makes it friendly for benchtop instruments and sensitive metrology setups.

Company’s Order Placement Process and Guarantees

• Warranty: 365 days
• Delivery: 1 week if in stock; no more than one month at the latest
• Payment: 50% advance payment; full payment before delivery
• Express delivery: FedEx, UPS, DHL

Key Features

• Approx. 50 l/s pumping speed (N₂) – Typically delivers quick pump-down for small-to-medium chambers and load locks.
• Compact DN 63 inlet – Common ISO-K or CF configurations make retrofits easier and keep adapters to a minimum.
• Clean, oil-free high vacuum – Turbomolecular compression minimizes hydrocarbon backstreaming when paired with a suitable backing pump.
• Controller-compatible operation – Works with Leybold turbo controllers; remote start/stop and status signals are straightforward in most cases.
• Air-cooled design – Simple installation; optional accessories can add water-cooling if your thermal budget is tight.
• Low vibration footprint – Helps protect beam stability and measurement repeatability on analytical tools.
• Serviceable bearing concept – Typically hybrid-ceramic ball bearings with planned service intervals for predictable uptime.

Technical Specifications

Related or Supporting Products

• LEYBOLD TURBOVAC 50 i – Newer generation with modern electronics; drop-in concept for many DN 63 applications.
• LEYBOLD TURBODRIVE (controller) – Matched controller for TURBOVAC series; offers RS‑232/RS‑485 and remote I/O.
• LEYBOLD TRIVAC D 4 B or D 8 B (backing pumps) – Reliable rotary vane options sized for small turbos.
• LEYBOLD SOGEVAC SV 16 B (backing pump) – Dry-preferring environments typically choose this for low maintenance.
• DN 63 inlet screen / baffle – Helps protect rotor from particulates; especially useful in coating and etch systems.
• Right‑angle high‑vacuum valve (ISO‑K 63) – For isolation during maintenance or rapid vent cycles.
• 24 V vent valve kit – Controlled venting to protect bearings and reduce particles on vent.

If you’re upgrading a legacy chamber with limited space, the TURBOVAC 50 typically replaces older DN 63 turbos with minimal adapter hardware. For higher throughput, many users step up to LEYBOLD TURBOVAC 90 i or comparable 60 l/s class pumps from other brands, but the 50 often hits the sweet spot for compact tools.

Installation & Maintenance

• Mounting – Install on a rigid DN 63 flange; vertical shaft up is preferred. Add a centering ring with clean, undamaged seals.
• Cabinet & ventilation – Provide clear airflow around the pump/controller; avoid recirculating hot air. Keep ambient 5–40 °C.
• Wiring – Use the matched Leybold controller and cables. Ground the system properly and route signal cables away from RF sources.
• Foreline – Keep lines short and leak‑tight. A foreline trap can help in processes with condensables.
• Valving – Fit an isolation valve below the turbo and a controlled vent valve to protect bearings during shutdown.
• Start/stop – From my experience, letting the pump reach full speed before opening to the chamber improves stability and cleanliness.

• Routine checks – Inspect vibration level and run‑up time; unusual increases often signal bearing wear.
• Cleanliness – Keep the inlet screen clean; prevent dust or flakes from entering the rotor path.
• Firmware & logs – Update controller firmware when available; review event logs for early fault indications.
• Service interval – Bearing service is typically planned on multi‑year intervals, depending on duty cycle and vent frequency.

Quality & Certifications

• CE compliant
• RoHS compliant
• Manufactured under ISO 9001 quality systems
• Controller variants may carry UL markings (region-dependent)
• Manufacturer’s warranty: 365 days (standard)