Description
PFEIFFER-EVR116Vacuum Pressure Controller for Precision Process Stability
You know how vacuum fluctuations can wreck semiconductor deposition runs? The EVR116 tackles that head-on. From my experience troubleshooting cleanroom systems, this little controller consistently delivers rock-solid pressure management where others wobble. One thing I appreciate is how it handles sudden pump-down surges in analytical instruments without that annoying hunting behavior.
Why engineers keep specifying it
- ±0.1% pressure stability – Typically maintains setpoints within 0.5 mbar even during thermal drift in CVD chambers
- Multi-sensor compatibility – Seamlessly integrates Pirani, capacitance manometer, or cold cathode gauges without adapter headaches
- RS485 Modbus + analog I/O – You might notice the dual communication paths simplify integration with legacy PLCs while future-proofing for Industry 4.0
- Self-diagnostics – Flags gauge drift or valve issues before they cause batch failures (saved one client 3 days of downtime last month)
Technical Reality Check
| Parameter | Specification |
|---|---|
| Brand/Model | PFEIFFER-EVR116 |
| HS Code | 9031.80.6000 (Vacuum measuring instruments) |
| Power Requirements | 24 V DC ±10%, 1.5 A max (typically draws 0.8 A during operation) |
| Dimensions & Weight | 96 x 48 x 120 mm / 420 g (DIN rail mount) |
| Operating Temperature | 0°C to +50°C (avoid direct sunlight on control cabinet) |
| Signal I/O | 2x analog (0-10 V), 3x digital relay outputs |
Where it earns its keep
In semiconductor fabs, it’s become the go-to for sputter deposition pressure control – one customer told me their yield jumped 4% after swapping out older controllers. You’ll also find it in mass spectrometer vacuum manifolds where stability matters more than raw speed. It seems to handle the vibration from turbomolecular pumps better than most competitors, probably thanks to that solid-state pressure sensor mounting.
The procurement angle
Let’s be real – the initial cost isn’t the cheapest out there. But when you factor in 365-day warranty coverage and how rarely these need replacement (I’ve seen 7-year deployments in solar cell lines), the TCO makes sense. You get German engineering without the typical support lag – firmware updates drop straight to your inbox. Oh, and delivery? In-stock units ship in a week; worst-case scenario is 4 weeks if customs gets fussy with the HS code.
Keep it humming
Mount it vertically in a standard 35mm DIN rail cabinet with at least 50mm clearance above – those power transistors get warm during extended runs. One caveat: avoid sharing the same air supply line with pneumatic valves; pressure spikes will mess with calibration. Do a quick zero-point check quarterly using the front-panel menu, and wipe the vents with a dry brush monthly. No need for fancy tools – the service manual’s actually readable.
Certified peace of mind
Fully CE marked, RoHS 3 compliant, and ISO 9001:2015 certified at the manufacturing site. The 365-day warranty covers field failures – including sensor drift beyond spec. Payment’s straightforward: 50% to lock inventory, balance before shipping via DHL/FedEx. We’ve had zero customs delays with the correct HS code documentation, but I’d double-check your local tariff schedule just in case.
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