ZYGO ZMI 7702 (P/N 8070-0102-35) – Dual‑Axis Measurement Board for Precision DMI Position Feedback

The ZYGO ZMI 7702, part number 8070-0102-35, is a dual‑axis measurement board designed for ZYGO ZMI interferometric metrology systems. From my experience, this board is the workhorse that decodes heterodyne interferometer signals and delivers stable, nanometer‑class position data to the controller backplane—ideal for precision motion platforms where repeatability and uptime matter.

Company’s Order Placement Process and Guarantees

• Warranty: 365 days
• Lead time: 1 week if in stock; no more than 1 month at the latest
• Payment: 50% advance payment; full payment prior to delivery
• Express options: FedEx, UPS, DHL

Key Features

• Dual‑axis measurement – Processes two independent interferometer channels for multi‑axis stage feedback.
• Heterodyne DMI signal processing – Built for ZYGO’s displacement interferometer architecture to maintain high stability and low drift.
• Backplane integration – Outputs real‑time position words and status over the ZMI chassis backplane, simplifying wiring.
• Deterministic updates – Consistent timing to support precision motion control loops in demanding semiconductor or metrology tasks.
• Field‑proven design – The 7702 series is widely used; it typically drops into existing ZYGO ZMI racks with minimal reconfiguration.
• Service‑friendly – Board‑level replacement reduces downtime compared with system‑level swaps.

Technical Specifications

Brand / Model	ZYGO ZMI 7702 (P/N 8070-0102-35)
HS Code	9031.90 (Parts and accessories of measuring or checking instruments)
Function	Dual‑axis heterodyne interferometer measurement board for DMI position feedback
Power Requirements	Powered via ZMI chassis backplane (no external supply required)
Operating Temperature	Typically laboratory ambient; common usage 15–35°C, non‑condensing
Signal Inputs	Heterodyne interferometer beat signals from ZYGO DMI receivers (two axes)
Outputs	Real‑time position/count data and axis status to controller via ZMI backplane
Communication Interfaces	Proprietary ZMI chassis backplane; no user I/O required on the board edge
Installation Method	Single‑slot plug‑in module for ZMI rack; ESD handling and powered‑down insertion recommended
Compatibility	For ZYGO ZMI interferometric metrology systems using heterodyne DMI optics

Application Fields

You might notice that the ZMI 7702 tends to show up wherever nanometer‑level positioning is non‑negotiable. Typical use cases include:

• Semiconductor wafer and mask stages (XY/θ feedback)
• Precision optics alignment systems and interferometric benches
• Coordinate and form metrology equipment
• High‑end motion platforms in research labs and advanced manufacturing

Advantages & Value

• Reliability – The 7702 series is known for long‑term stability; fewer unexplained dropouts means fewer line‑stops.
• System compatibility – Designed to slot straight into ZYGO ZMI racks, keeping the rest of your optics and laser sources untouched.
• Cost control – Board‑level replacement typically costs less than complete controller swaps and shortens maintenance windows.
• Supportable lifecycle – We assist with revision checks and functional testing so your axis mapping and timing remain consistent.

Customer note: “Swapped in a 7702 on a dual‑axis wafer stage and were back within alignment in under two hours—no controller re‑write needed.”

Installation & Maintenance

• Environment – Install in a clean, temperature‑stable lab or equipment bay; allow adequate chassis ventilation.
• Handling – ESD protection is a must. Power down the ZMI chassis before insertion or removal.
• Wiring – Keep fiber/receiver paths strain‑free; secure backplane seating with the card guides and screws.
• Firmware/Revision – Match board revision and firmware to your controller baseline; in many cases, mixed revisions can introduce timing offsets.
• Care – No routine calibration on the board itself; maintain the system optics, clean connectors, and check chassis filters periodically.

Quality & Certifications

• Manufacturer quality system: typically ISO 9001
• Safety/EMC: CE marking is usually applied at the complete ZMI system level
• RoHS: varies by production date and revision; we can screen stock to your site compliance
• Warranty: 365 days from shipment

Related/Supporting Components

To complete or service a ZMI channel, you would typically pair the 7702 with:

• ZYGO ZMI heterodyne laser source modules (for the reference/measurement frequencies)
• ZYGO DMI optical receivers and beam splitters for each axis
• Plane‑mirror or linear interferometer optics matched to your stage travel
• ZMI rack/chassis assemblies and backplane, plus interface cards for your motion controller