Description

Lam Research 810‑048219‑022 Pulse & Hold PCB Assembly

Technical Specifications

• Product Model: 810‑048219‑022
• Brand: Lam Research
• Warranty: One Year
• Module Type: Pulse & Hold sample‑hold control PCB for sub‑injector ion source system
• Interfaces: Multiple D‑sub connectors, SMA RF signal ports, analog monitoring terminals
• Signal Handling: High‑speed pulse sampling, analog signal capture for ion beam excitation control
• Operating Temperature: 0 °C ~ +50 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 cleanroom rack‑mount PCB assembly
• Accuracy Class: Semiconductor etch tool high‑speed analog‑sampling grade
• System Compatibility: Lam Sabre, Vector, Exelan series plasma processing tools
• Diagnostics: On‑board test points for signal measurement, component status verification
• Humidity: 5‑95 % RH non‑condensing, clean‑room compatible
• Weight: 0.44 kg
• Dimensions: Standard Lam tool plug‑in PCB footprint
• 

Product Overview

810‑048219‑022 is a critical pulse‑and‑hold printed‑circuit‑board assembly deployed within Lam sub‑injector ion source subsystems. It samples and holds high‑speed analog excitation signals to drive ion‑source RF excitation and ion‑beam generation for wafer etch processing. Precision analog circuitry ensures stable beam performance for wafer fabrication. Obsolete OEM spare; surplus and refurbished tested spare board for fab tool maintenance and spare‑part stocking projects.

Application Notes

‑ Strict ESD anti‑static handling required in clean‑room environment. ‑ Verify SMA and D‑sub cable terminations before power‑on. ‑ Typical deployment: Lam Sabre / Vector / Exelan tool sub‑injector PCB spare‑part stocking.