Description

Lam Research 810‑107813‑306 ESC Power Supply PCB Assembly

Technical Specifications

• Product Model: 810‑107813‑306
• Brand: Lam Research
• Warranty: One Year
• Module Type: Electrostatic Chuck (ESC) power supply PCB assembly
• Function: High‑voltage bias generation and regulation for electrostatic wafer chuck; provides chuck hold‑voltage for wafer clamping during etch recipes
• Power Path: High‑voltage DC regulated output for ESC dielectric biasing; over‑voltage, over‑current fault detection
• Control Interface: Digital command interface from tool main controller for bias‑voltage set‑point adjustment
• Operating Temperature: 0 °C ~ +50 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 tool‑mount high‑voltage power PCB
• Accuracy Class: Semiconductor etch‑tool ESC high‑voltage power‑regulation grade
• System Compatibility: Lam 300 mm etch‑tool electrostatic chuck subsystem
• Diagnostics: High‑voltage status indicators, fault flag outputs for over‑current / over‑voltage events
• Humidity: 5‑95 % RH non‑condensing, clean‑room compliant
• Weight: 1.12 kg
• Dimensions: Lam ESC power‑supply PCB footprint
• 

Product Overview

810‑107813‑306 is the ESC power‑supply PCB generating and regulating the high‑voltage bias used to electrostatically clamp wafers onto the process‑chamber pedestal. Stable ESC bias voltage is critical for reliable wafer clamping, thermal‑contact performance and prevention of wafer slip‑out during plasma‑etch processing. High‑voltage spare requiring careful service procedures. Surplus and refurbished tested spare ESC power‑supply PCB for chamber PM and repair projects.

Application Notes

‑ Strict high‑voltage lockout‑tagout safety procedures must be followed. ‑ Confirm output‑voltage calibration after board replacement. ‑ Typical deployment: Lam ESC power‑supply PCB spare‑part stocking.