Description

Lam Research 810‑064624‑401 ESC Filter PCB Assembly, Bicep II

Technical Specifications

• Product Model: 810‑064624‑401
• Brand: Lam Research
• Warranty: One Year
• Module Type: Electrostatic Chuck (ESC) filter PCB assembly for Bicep II platform
• Circuit Components: High‑voltage resistors, surge‑suppression capacitors, noise‑filter network
• Function: High‑voltage noise filtering, surge absorption for electrostatic chuck bias supply
• Operating Voltage: High‑voltage DC filter path for ESC chuck biasing
• Operating Temperature: 0 °C ~ +55 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 tool‑mount filter PCB
• Accuracy Class: Semiconductor etch chamber high‑voltage filter grade
• System Compatibility: Lam Bicep II, Syndion F‑series etch processing systems
• Diagnostics: Visual inspection points for resistor / capacitor health check
• Humidity: 5‑95 % RH non‑condensing, clean‑room compliant
• Weight: 0.16 kg
• Dimensions: Compact Lam filter‑board footprint
• 

Product Overview

810‑064624‑401 ESC filter PCB assembly suppresses high‑frequency noise and absorbs voltage surges on the electrostatic chuck bias circuit. It protects ESC dielectric layer and upstream high‑voltage power supplies from plasma‑induced transients during wafer etch cycles. Critical consumable‑adjacent spare for chamber preventive maintenance. Surplus and refurbished tested spare filter board for 300 mm etch‑tool overhaul projects.

Application Notes

‑ Confirm resistor and capacitor integrity before installation. ‑ High‑voltage safety procedures must be followed during replacement. ‑ Typical deployment: Lam Bicep II ESC filter PCB spare‑part stocking.