Description

Lam Research 605‑A02119‑001 VME Single Board Computer (SBC)

Technical Specifications

• Product Model: 605‑A02119‑001 (X10‑14210000)
• Brand: Lam Research
• Warranty: One Year
• Module Type: VME‑bus single‑board computer (SBC)
• Form Factor: Standard VME 6U eurocard
• Processor: High‑performance embedded CPU for tool host‑control execution
• On‑board Resources: Industrial memory, local SSD storage, multi‑port Ethernet, serial communication interfaces
• VME Interface: VMEbus master / slave system‑bus interface
• Operating Temperature: +5 °C ~ +45 °C
• Storage Temperature: ‑20 °C ~ +70 °C
• Protection Class: IP20 VME‑chassis plug‑in CPU board
• Accuracy Class: Semiconductor equipment host‑controller SBC grade
• System Compatibility: Lam 2300, Kiyo‑series VME‑based etch processing platforms
• Diagnostics: Front‑panel status LEDs, system self‑test capability
• Humidity: 5‑95 % RH non‑condensing, clean‑room compliant
• Weight: 1.95 kg
• Dimensions: 6U VME eurocard standard dimensions
• 

Product Overview

605‑A02119‑001 is the VME‑bus single‑board computer acting as main host controller for multiple Lam legacy etch tools. It executes tool host software, recipe management, chamber sequencing, interlock handling and host‑network communication. This is a high‑value critical OEM spare for legacy 300 mm wafer‑processing systems. Surplus and refurbished tested spare VME‑SBC for fab tool overhaul and system‑recovery projects.

Application Notes

‑ Strict ESD anti‑static handling for VME‑card replacement. ‑ Verify firmware revision compatibility with chassis back‑plane and peripheral boards. ‑ Typical deployment: Lam VME single‑board‑computer SBC spare‑part stocking.