Description

Lam Research 796‑130485‑003 Chamber Gas Box Control PCB Assembly

Technical Specifications

• Product Model: 796‑130485‑003
• Brand: Lam Research
• Warranty: One Year
• Module Type: Chamber gas box control PCB assembly
• Function: Mass‑flow‑controller (MFC) communication & valve‑driver logic for process gas delivery subsystem; handles gas‑sequence execution, valve actuation and MFC set‑point control
• Interfaces: Multiple valve drive outputs, digital MFC communication ports, system host interface
• Operating Temperature: 0 °C ~ +50 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 gas‑box‑mount PCB assembly
• Accuracy Class: Semiconductor process‑gas‑delivery control grade
• System Compatibility: Lam etch‑tool chamber gas box subsystems
• Diagnostics: Valve‑status LED indicators, MFC communication fault detection
• Humidity: 5‑95 % RH non‑condensing, clean‑room compatible
• Weight: 0.43 kg
• Dimensions: Compact gas‑box‑mount PCB footprint
• 

Product Overview

796‑130485‑003 gas‑box control PCB governs process‑gas sequencing, solenoid‑valve driving and MFC set‑point communication inside Lam chamber gas box. It is responsible for precise gas‑flow delivery required for plasma etch recipes. Board failure leads to gas‑sequence faults, recipe abort and tool downtime. Surplus and refurbished tested spare gas‑control PCB for chamber PM and repair projects.

Application Notes

‑ ESD anti‑static handling mandatory during replacement. ‑ Verify gas‑valve and MFC communication after board installation. ‑ Typical deployment: Lam chamber‑gas‑box‑control‑PCB spare‑part stocking.