Description

Lam Research 853‑260566‑202 Analog Input Multiplexer PCB Assembly

Technical Specifications

• Product Model: 853‑260566‑202
• Brand: Lam Research
• Warranty: One Year
• Module Type: Multi‑channel analog input multiplexer PCB assembly
• Channel Handling: High‑density analog signal multiplexing for chamber pressure, temperature, voltage and current sensor feedback
• Signal Type: 0‑10 V, 4‑20 mA industrial analog process signals
• Interface: System back‑plane bus, multi‑pin field sensor ribbon connectors
• Operating Temperature: 0 °C ~ +55 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 tool‑rack plug‑in PCB assembly
• Accuracy Class: Semiconductor process‑chamber analog‑signal‑acquisition grade
• System Compatibility: Lam multi‑chamber 300 mm etch processing platforms
• Diagnostics: Analog test‑points, power‑status LED indicators, channel fault reporting
• Humidity: 5‑95 % RH non‑condensing, clean‑room compliant
• Weight: 0.71 kg
• Dimensions: Lam analog‑MUX PCB footprint
• 

Product Overview

853‑260566‑202 analog multiplexer PCB collects large numbers of analog sensor signals from process chambers, routes selected signals to main system acquisition circuits. It reduces field‑wiring complexity in multi‑chamber tools. Loss of channels will cause process‑parameter monitoring faults and tool interlock trips. Surplus and refurbished tested spare analog‑MUX board for fab preventive‑maintenance projects.

Application Notes

‑ Observe ESD precautions for PCB handling and installation. ‑ Verify all ribbon‑cable connectors are fully seated. ‑ Typical deployment: Lam analog‑input‑multiplexer‑PCB spare‑part stocking.