Description
Technical Specifications
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Product Model: 685-151520-102
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Brand: LAM Research
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Warranty: One Year
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Input Voltage: 24 VDC industrial standard power input
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Operating Temperature: 0°C to +60°C
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Storage Temperature: -20°C to +70°C
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Response Time: Microsecond-level industrial data processing and signal response
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Protection Class: IP20 industrial cabinet protection grade
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Accuracy Class: Industrial-grade high-precision process data calculation and timing accuracy
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Output Frequency: Standard industrial system clock frequency for semiconductor equipment control
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Rated Current Range: Standard industrial computer operating current, stable low ripple power load
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Communication Interface: Ethernet port, multi-channel I/O top tray integrated interface
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Supported Protocols: Industrial Ethernet protocols, semiconductor equipment dedicated communication protocols
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Overload Capacity: Built-in overvoltage, overcurrent and surge protection for industrial operating environments
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Dimensions: Custom compact top tray form factor for LAM Research semiconductor process equipment
Application Scenarios
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Semiconductor Wafer Etching Equipment Control: This LAM Research top tray industrial computer acts as the core data processing terminal for wafer etching process equipment. It collects real-time I/O signals from process sensors, transmits operating data via Ethernet, and stores critical process parameters locally. The optimized microsecond-level response capability ensures precise synchronization of gas flow, temperature, pressure and radio frequency control during etching processes, eliminating process deviation caused by delayed data processing and improving wafer processing yield and consistency.
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Semiconductor Deposition Process Monitoring: Deployed on thin-film deposition manufacturing equipment, the 685-151520-102 unit undertakes real-time scheduling of equipment logic commands and full-process data recording. Its integrated HDD storage module realizes long-term retention of production data, supporting full-link process traceability required by semiconductor manufacturing standards. Industrial-grade anti-interference and anti-vibration design adapts to high-precision production workshop environments, avoiding equipment downtime or process anomalies caused by computing hardware failures.
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