Description
LAM Research 839-101612-885 Product Description
Technical Specifications
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Product Model: 839-101612-885
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Brand: LAM Research
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Warranty: One Year
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Input Voltage: Standard semiconductor ESC system matching operating voltage
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Operating Temperature: -20°C to 70°C (-4°F to 158°F)
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Storage Temperature: -40°C to 85°C (-40°F to 185°F)
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Response Time: Millisecond-level rapid electrostatic adsorption and release response
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Protection Class: Semiconductor industrial grade dust-proof, corrosion-resistant and high-insulation protection
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Accuracy Class: Uniform electric field distribution with high-precision wafer positioning and fixing accuracy
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Output Frequency: Stable electrostatic control frequency adapted to wafer processing cycles
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Rated Current Range: Low steady-state operating current for electrostatic chuck operation
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Communication Interface: Dedicated semiconductor process system matching interface
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Supported Protocols: Standard semiconductor equipment control and monitoring protocols
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Overload Capacity: Built-in overvoltage protection and static equilibrium adjustment function
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Dimensions: Customized standard size matching LAM semiconductor etching equipment
Product Overview
The 839-101612-885 is a core electrostatic chuck (ESC) component developed by LAM Research, specially configured for semiconductor etching and wafer processing equipment. This precision process component generates uniform electrostatic force to stably clamp and fix wafers during high-precision semiconductor manufacturing processes, effectively preventing wafer displacement and vibration that affect processing yield. It features highly uniform electric field distribution and reliable static adsorption performance, ensuring consistent wafer flatness and positioning accuracy throughout etching and stripping operations. Adopting high-insulation and corrosion-resistant industrial materials, it adapts to high-precision and clean semiconductor workshop environments. With stable electrostatic response and self-balancing static adjustment capability, it supports long-term continuous high-precision process operation. It is widely used in LAM series semiconductor processing equipment, providing stable and reliable wafer positioning solutions for semiconductor manufacturing and equipment maintenance teams.
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