Description
AMAT 0100-09463 is a high-purity 8-inch TEOS susceptor, a core ceramic component for Applied Materials semiconductor deposition systems. It supports precise wafer heating and uniform film deposition in wafer fabrication.
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Core Specifications
- Brand: Applied Materials (AMAT)
- Model: 0100-09463
- Availability: In Stock
- Delivery Time: Within 3 days after payment
- Guarantee: 12 months warranty
- Condition: New, Original
- Type: TEOS Susceptor
- Wafer Size: 8 inch (200 mm)
- Material: High-purity ceramic (Al₂O₃)
- Heating Zone: Single-zone uniform heating
- Working Temperature: Up to 500°C
- Flatness: ±0.02 mm
- Weight: Approx. 1.8 kg (4.0 lbs)
Key Features
- Ultra-Uniform Heating: High-purity ceramic body ensures ±1°C temperature uniformity across the 8” wafer, critical for consistent TEOS oxide deposition.
- High Purity & Durability: Chemically inert ceramic material resists plasma erosion and contamination, extending service life in cleanroom environments.
- Precision Machining: Tight flatness and dimensional tolerances enable perfect wafer seating and stable process repeatability.
Industry Applications
- Semiconductor Manufacturing: TEOS oxide deposition for 8” wafer processing in FAB facilities.
- Wafer Fabrication: Used in Applied Materials PECVD/SACVD systems for dielectric layer deposition.
- Microelectronics: Critical component for memory and logic chip production requiring high film uniformity.
- Cleanroom Process Systems: High-temperature susceptor for thin-film deposition in advanced semiconductor nodes.
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