Description

LAM 605-048878-001 | VME bus single board computer (SBC)
605-048878-001 is a VME bus single board computer (SBC) on the LAM Research (Fujitsu Semiconductor) equipment. The OEM model is GE FANUC VME-7671-421000, used for the main control of semiconductor etching / deposition equipment.

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Basic Information
Brand: LAM
Model: 605-048878-001
OEM Model: GE FANUC VME-7671-421000
Type: VME bus CPU main control board (SBC)
Application: LAM semiconductor equipment (etching / deposition, etc.)
Weight: Approximately 0.6 kg Key specifications
Architecture: VME64 single-slot board
Processor: Embedded CPU (GE Fanuc 7671 series)
Memory / Storage: Built-in flash memory + RAM, supports system firmware storage
Interfaces: VME backplane interface, Ethernet, serial port, etc.
Firmware: Flash V0.1 (common identifier)
Operating environment: Semiconductor equipment standard temperature-controlled environment
Functions: Equipment motion control, process scheduling, I/O and communication management

Market and Status
Original factory status: (EOL)， only second-hand / refurbished spare parts are available for circulation
Price range： Approximately $1，500 – $4，800 (depending on condition and warranty)
Common conditions： Disassembled second-hand (most cases)， a few refurbished
Replacement / Swap： Directly corresponds to VME-7671-421000， no fully compatible new model exists Typical application
LAM 300mm etching machine (such as Exelan, Versys series
Main control and data processing of semiconductor wafer processing equipment
Automation equipment upgrade of fab factory VME system / Spare parts replacement