Description

Lam Research 810‑240284‑005 Bias Generator Control PCB Assembly

Technical Specifications

• Product Model: 810‑240284‑005
• Brand: Lam Research
• Warranty: One Year
• Module Type: Bias generator control PCB assembly
• Function: Control and monitoring for chamber substrate bias power supply; generates set‑point commands, reads bias‑voltage / bias‑current feedback, executes over‑voltage and over‑current protection logic
• Signal Interfaces: Analog feedback inputs, digital host command interface, fault‑flag output terminals
• Operating Temperature: 0 °C ~ +55 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 tool‑rack plug‑in PCB assembly
• Accuracy Class: Semiconductor etch‑tool substrate‑bias power‑control grade
• System Compatibility: Lam 300 mm etch‑tool substrate‑bias subsystem
• Diagnostics: Bias‑parameter monitoring test‑points, fault‑status LED indicators
• Humidity: 5‑95 % RH non‑condensing, clean‑room compliant
• Weight: 0.66 kg
• Dimensions: Lam bias‑generator‑control‑PCB footprint
• 

Product Overview

810‑240284‑005 bias‑generator control PCB is the controller for substrate bias power supply, regulating wafer‑bias voltage during plasma‑etch processes. Accurate bias control directly influences ion‑energy distribution, etch profile and wafer‑processing yield. This board monitors critical operating parameters and triggers protective shutdown upon abnormal conditions. Surplus and refurbished tested spare bias‑control board for fab tool maintenance‑projects.

Application Notes

‑ Strict ESD precautions for PCB replacement. ‑ Complete bias‑output calibration validation after board swap‑out. ‑ Typical deployment: Lam bias‑generator‑control‑PCB spare‑part stocking.