Description

Lam Research 853‑286139‑015 Chamber MUX II PCB Assembly

Technical Specifications

• Product Model: 853‑286139‑015
• Brand: Lam Research
• Warranty: One Year
• Module Type: Chamber MUX II multiplexer PCB assembly, includes MUX daughter‑board interface
• Function: Analog & discrete signal multiplexing for multi‑chamber tool signal routing; routes chamber sensor and feedback signals to main control subsystems
• Interfaces: Multi‑channel signal connectors, back‑plane system bus interface, daughter‑card mating connector
• Operating Temperature: 0 °C ~ +55 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 tool‑rack plug‑in PCB assembly
• Accuracy Class: Semiconductor multi‑chamber signal‑multiplexing grade
• System Compatibility: Lam multi‑chamber 300 mm etch processing platforms
• Diagnostics: Signal test‑points, power‑status LED indicators
• Humidity: 5‑95 % RH non‑condensing, clean‑room compliant
• Weight: 0.98 kg
• Dimensions: Lam Chamber MUX II main‑board footprint with daughter‑card stacking capability
• 

Product Overview

853‑286139‑015 Chamber MUX II PCB routes large volumes of chamber‑originated analog and discrete sensor signals via multiplexer architecture, reducing tool‑wiring complexity in multi‑chamber etch systems. It works with matching daughter‑board assemblies to expand signal‑handling capacity for multiple process chambers. Failure of this board will cause loss of chamber‑sensor feedback and tool fault‑down conditions. Surplus and refurbished tested spare MUX main‑board for fab tool maintenance‑projects.

Application Notes

‑ Strict ESD anti‑static handling for main‑board and daughter‑cards. ‑ Verify all inter‑board mating connectors are fully seated at installation. ‑ Typical deployment: Lam Chamber MUX II main‑PCB spare‑part stocking.