Description

Lam Research 810‑072687‑525 Interlock Control PCB Assembly

Technical Specifications

• Product Model: 810‑072687‑525
• Brand: Lam Research
• Warranty: One Year
• Module Type: Chamber / system interlock control PCB assembly
• Function: Discrete interlock‑signal acquisition, safety‑interlock logic processing, interlock relay drive outputs
• I/O Interface: Multiple ribbon‑cable and discrete connector terminals for safety sensor, door‑interlock, EMO signals
• Operating Temperature: 0 °C ~ +55 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 tool‑rack plug‑in PCB assembly
• Accuracy Class: Semiconductor tool safety‑interlock control grade
• System Compatibility: Lam 300 mm process‑tool interlock safety subsystem
• Diagnostics: On‑board status LEDs for interlock‑channel state indication
• Humidity: 5‑95 % RH non‑condensing, clean‑room compatible
• Weight: 0.63 kg
• Dimensions: Standard Lam interlock‑control PCB footprint
• 

Product Overview

810‑072687‑525 interlock‑control PCB monitors all safety‑related discrete signals including chamber‑door interlocks, emergency‑off, gas‑system safety status and other tool‑protection sensors. It executes hard‑wired interlock logic to inhibit dangerous tool operations when safety conditions are violated. Essential safety‑critical spare for Lam production etch tools. Surplus and refurbished tested spare interlock‑control board for fab preventive‑maintenance projects.

Application Notes

‑ ESD protection mandatory during replacement. ‑ Full interlock‑safety proof‑test must be performed after board swap‑out. ‑ Typical deployment: Lam system interlock‑control PCB spare‑part stocking.