Description

Lam Research 810‑227611‑003 LONWORKS / Ethernet Node Board with LCD

Technical Specifications

• Product Model: 810‑227611‑003
• Brand: Lam Research
• Warranty: One Year
• Module Type: LONWORKS & Ethernet communication node PCB with local LCD status display
• Communication: LONWORKS fieldbus, Ethernet network interface for tool subsystem communication
• Local HMI: On‑board LCD for local status, fault and diagnostic readout
• Processor: Embedded microcontroller for node‑level subsystem management
• Operating Temperature: 0 °C ~ +50 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 tool‑rack plug‑in PCB assembly
• Accuracy Class: Semiconductor tool node‑level communication & local‑HMI grade
• System Compatibility: Lam legacy platform distributed node control architecture
• Diagnostics: On‑board LCD status, network activity LEDs, fault‑code display
• Humidity: 5‑95 % RH non‑condensing, clean‑room compatible
• Weight: 0.51 kg
• Dimensions: Standard Lam node‑board PCB footprint with LCD cutout
• 

Product Overview

810‑227611‑003 is a distributed node‑controller board combining LONWORKS fieldbus, Ethernet connectivity and integrated LCD local display. It handles subsystem‑level control and network communication for Lam legacy semiconductor processing equipment, and presents local fault and status information via built‑in LCD screen. Used for chamber‑subsystem monitoring and interlock‑handling functions. Surplus and refurbished tested spare node board for fab tool maintenance‑projects.

Application Notes

‑ ESD protection required during replacement. ‑ Verify network node address configuration after board swap‑out. ‑ Typical deployment: Lam LONWORKS‑Ethernet node‑board with LCD spare‑part stocking.