Description

LAM Research 810-002895-002 LonWorks Valve Control Node PCB Board

Technical Specifications

• Product Model: 810-002895-002
• Brand: LAM Research
• Warranty: One Year
• Input Voltage: 24 VDC ±10% regulated industrial power
• Operating Temperature: 0°C to +65°C
• Storage Temperature: -40°C to +85°C
• Response Time: ≤8ms for valve actuation signal output
• Protection Class: IP20 (cabinet enclosed installation only)
• Accuracy Class: Analog signal control precision ±0.04% full scale
• Output Frequency: 500Hz internal bus communication clock
• Rated Current Range: Continuous 3.5A, peak 7A transient load
• Communication Interface: LonWorks twisted-pair bus, terminal block hardwired I/O terminals
• Supported Protocols: LonTalk proprietary fieldbus, DI/DO discrete point control protocol
• Overload Capacity: 200% short-duration overload with fuse and thermal cutoff protection
• Dimensions: 215mm (Length) × 148mm (Width) × 32mm (Height)
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Product Overview

The 810-002895-002 is a dedicated LonWorks-based valve control node printed circuit board engineered exclusively for LAM Research V2 series semiconductor etching and thin-film deposition process platforms. This modular PCB acts as a distributed field control unit that governs the opening, closing, and proportional adjustment of mass flow controllers, pneumatic gas shutoff valves, and vacuum isolation valves within wafer processing chambers.

It addresses core operational pain points in high-volume semiconductor fabs, including inconsistent process gas delivery, delayed safety interlock responses during abnormal pressure spikes, fragmented field device diagnostics, and complicated fault tracing across multi-chamber tool architectures. Constructed with EMC-shielded PCB substrates, surge suppression circuits, and vibration-resistant soldering, the board withstands electromagnetic interference, minor cabinet vibration, and temperature cycling typical in cleanroom equipment enclosures.