Description

LAM Research 839-800327-438 Electrostatic Clamping System (ESC)
839-800327-438 is the original 300mm electrostatic clamping system (ESC Chuck) from LAM Research (Fulin Semiconductor), used in platforms such as Flex45 etching machines, responsible for wafer vacuum adsorption and temperature control, and is a core component of semiconductor etching processes.

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Key Parameters
Brand: LAM Research
Model: 839-800327-438
Type: 300mm ESC (Electrostatic Clamping System), ceramic material
Compatible Equipment: LAM Flex45 etching machine
Function: Wafer electrostatic adsorption, temperature control, vacuum sealing
Condition: Original factory new / Disassembled second-hand (with test report)
Delivery Time: In stock 3-5 days; Customized 10-15 days
Warranty: 12 months
Alternative Names: S-839-800327-438, ESC ASSY 300mm Key features

High-precision adsorption: The electrostatic adsorption force is uniform, ensuring that the 300mm wafer remains stable and without deviation during high-speed etching.
Precise temperature control: Built-in cooling/heating channels, with temperature control accuracy of ±0.5°C, suitable for demanding etching processes.
High-durability ceramics: Resistant to plasma corrosion and low particle contamination, with long lifespan, suitable for mass production environments.
Compatible with original factory systems: Fully compatible with the electrical, vacuum, and cooling interfaces of the Flex45 platform, plug-and-play. Application scenario
Semiconductor manufacturing: 300mm wafer etching (Etch) and deposition (Deposition) processes.
High-end processes: Core components of 7nm/5nm advanced process etching equipment.
Equipment maintenance: ESC replacement, upgrade and spare parts reserve for LAM Flex45 machines.