Description

Lam Research 853‑203016‑173 24‑Channel Temperature Controller PCB

Technical Specifications

• Product Model: 853‑203016‑173
• Brand: Lam Research
• Warranty: One Year
• Module Type: 24‑channel temperature control main board assembly
• Channel Count: 24 independent temperature monitoring & control loops
• Sensor Types: RTD, thermistor interface for chamber heater pedestal assemblies
• Control Output: Closed‑loop heater drive signal generation for wafer thermal profile regulation
• Operating Temperature: 0 °C ~ +55 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 tool‑rack plug‑in PCB assembly
• Accuracy Class: Semiconductor process‑chamber precision thermal‑control grade
• System Compatibility: Lam 300 mm etch platform chamber thermal management subsystems
• Diagnostics: Channel fault detection, over‑temperature alarm signal output, test‑point access
• Humidity: 5‑95 % RH non‑condensing, clean‑room compatible
• Weight: 0.68 kg
• Dimensions: Standard Lam multi‑channel thermal‑control PCB footprint
• 

Product Overview

853‑203016‑173 is 24‑channel temperature‑controller main PCB for Lam semiconductor etch equipment. It reads multiple chamber‑mounted temperature sensors and generates closed‑loop heater control outputs to stabilize wafer temperature during plasma etch recipes. Consistent thermal performance directly impacts wafer‑to‑wafer etch uniformity and process yield. Surplus and refurbished tested spare thermal‑control board for fab tool maintenance‑projects.

Application Notes

‑ ESD protection mandatory during PCB swap‑out. ‑ Re‑verify sensor calibration after board replacement. ‑ Typical deployment: Lam 24‑chamber temperature‑controller PCB spare‑part stocking.