Description

Lam Research 810‑105035‑003 RF Match Control PCB Assembly

Technical Specifications

• Product Model: 810‑105035‑003
• Brand: Lam Research
• Warranty: One Year
• Module Type: RF match network control PCB assembly
• Function: Closed‑loop tuning control for plasma RF matching network; drives motor‑driven variable capacitors and inductors to achieve impedance matching between RF generator and plasma chamber load
• Interfaces: Motor drive outputs, RF sensor feedback inputs, host system communication port
• Operating Temperature: 0 °C ~ +55 °C
• Storage Temperature: ‑40 °C ~ +85 °C
• Protection Class: IP20 tool‑rack plug‑in PCB assembly
• Accuracy Class: Semiconductor etch‑tool RF impedance‑matching control grade
• System Compatibility: Lam 300 mm plasma etch chamber RF match subsystems
• Diagnostics: Tuning status LEDs, fault detection for match motor stall, sensor signal loss
• Humidity: 5‑95 % RH non‑condensing, clean‑room compatible
• Weight: 0.52 kg
• Dimensions: Standard Lam RF‑match‑control PCB footprint
• 

Product Overview

810‑105035‑003 is the control board for Lam RF impedance‑match network. It reads forward/reflected RF power sensor feedback and executes automatic tuning algorithms to adjust match‑network components, minimizing reflected RF power during plasma etch recipes. Proper RF matching ensures stable plasma condition, repeatable etch rate and chamber hardware protection. Surplus and refurbished tested spare RF‑match‑control PCB for fab tool chamber maintenance‑projects.

Application Notes

‑ Strict ESD protection required during replacement. ‑ Perform RF match auto‑tune calibration after board swap‑out. ‑ Typical deployment: Lam RF‑match‑control‑PCB spare‑part stocking.